Flor İçermeyen Hidrofobik İnce Filmlerin PECVD Yöntemi ile Üretimi
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Date
2025
Authors
Ay, Burak
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Florlu kimyasallar, hidrofobik ince filmlerin üretiminde yaygın olarak kullanılmaktadır. Ancak, bu kimyasalların çevre ve insan sağlığı üzerindeki riskleri konusundaki endişeler her geçen gün artarak devam etmektedir. Bu nedenle, flor içermeyen alternatif hidrofobik kaplama malzemelerinin geliştirilmesi önemlidir. Poli(2-etilheksil akrilat) (PEHA), uzun karbon zincirleri ile hidrofobik kaplamaların üretimi için önemli bir potansiyele sahiptir. Bu tez çalışmasında, PEHA ince filmleri düşük sıcaklıkta, tek aşamalı ve çevre dostu plazma destekli kimyasal buhar biriktirme (PECVD) yöntemiyle farklı alttaşların yüzeylerine kaplanmıştır. Reaktör basıncı, alttaş sıcaklığı ve plazma gücünün PEHA ince filminin kaplama hızı üzerindeki etkileri araştırılmış ve en yüksek kaplama hızı; 5°C alttaş sıcaklığı, 30 W plazma gücü ve 150 mTorr reaktör basıncında 19,1 nm/dak olarak ölçülmüştür. PEHA ince filminin ıslatma, kimyasal ve morfolojik özellikleri incelenmiştir. PEHA ince filmi, hidrofobik özellikler sergilemiş ve kaplanmış kumaşın su ile temas açısı 139,8° olarak ölçülmüştür. PEHA ince filminin hidrofobikliği, su dışında, gündelik yaşamda kullanılan çeşitli sıvılara karşı da test edilmiştir. Ayrıca, PEHA ince filmleri; çözücü direnci, yıkama ve yapışma testlerine karşı da mükemmel dayanıklılık göstermiştir.
Fluorinated chemicals are widely used in the production of hydrophobic thin films. However, concerns about the risks of these chemicals on the environment and human health continue to grow day by day. Therefore, it is important to develop alternative fluorine-free hydrophobic coating materials. Poly(2-ethylhexyl acrylate) (PEHA), with its long carbon chains, has a significant potential for the production of hydrophobic coatings. In this thesis, PEHA thin films were coated on the surfaces of different substrates by low temperature, one-step and environmentally friendly plasma enhanced chemical vapor deposition (PECVD) method. The effects of reactor pressure, substrate temperature and plasma power on the deposition rate of PEHA thin film were investigated and the highest deposition rate was measured as 19.1 nm/min at 5°C substrate temperature, 30 W plasma power and 150 mTorr reactor pressure. Wetting, chemical and morphological properties of PEHA thin film were investigated. The PEHA thin film exhibited hydrophobic properties and the contact angle of the coated fabric with water was measured as 139.8°. The hydrophobicity of the PEHA thin film was also tested against various liquids used in daily life besides water. In addition, PEHA thin films showed excellent resistance to solvent resistance, washing and adhesion tests.
Fluorinated chemicals are widely used in the production of hydrophobic thin films. However, concerns about the risks of these chemicals on the environment and human health continue to grow day by day. Therefore, it is important to develop alternative fluorine-free hydrophobic coating materials. Poly(2-ethylhexyl acrylate) (PEHA), with its long carbon chains, has a significant potential for the production of hydrophobic coatings. In this thesis, PEHA thin films were coated on the surfaces of different substrates by low temperature, one-step and environmentally friendly plasma enhanced chemical vapor deposition (PECVD) method. The effects of reactor pressure, substrate temperature and plasma power on the deposition rate of PEHA thin film were investigated and the highest deposition rate was measured as 19.1 nm/min at 5°C substrate temperature, 30 W plasma power and 150 mTorr reactor pressure. Wetting, chemical and morphological properties of PEHA thin film were investigated. The PEHA thin film exhibited hydrophobic properties and the contact angle of the coated fabric with water was measured as 139.8°. The hydrophobicity of the PEHA thin film was also tested against various liquids used in daily life besides water. In addition, PEHA thin films showed excellent resistance to solvent resistance, washing and adhesion tests.
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Kimya Mühendisliği, Chemical Engineering
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checked on Jul 10, 2026

